摘 要
微纳制造技术的发展对精密定位提出了更高要求，其在半导体、生物医疗等领域发挥着不可替代的作用。本研究旨在探讨精密定位技术在微纳制造中的应用，以实现高精度、高效率的制造过程。通过分析现有精密定位技术如压电驱动、磁悬浮等的工作原理及其在微纳尺度下的局限性，提出基于多物理场耦合的新型精密定位系统设计方案。该方案融合了智能算法优化路径规划与误差补偿机制，有效解决了传统方法难以兼顾快速响应与亚纳米级定位精度的问题。实验结果表明，在加工复杂微结构时，新型定位系统的定位精度可达0.5nm，重复定位精度优于1nm，显著提升了微纳制造的质量和效率。此外，本研究还开发了一套适用于多种微纳制造场景的通用型精密定位平台，不仅拓展了精密定位技术的应用范围，而且为微纳制造领域提供了新的技术思路，对于推动微纳制造技术向更精细、更智能方向发展具有重要意义。
关键词：精密定位技术 微纳制造 多物理场耦合
Abstract
The development of micro-nano manufacturing technology has imposed higher demands on precision positioning, which plays an irreplaceable role in fields such as semiconductors and biomedical engineering. This study aims to explore the application of precision positioning technology in micro-nano manufacturing to achieve high-precision and high-efficiency manufacturing processes. By analyzing the working principles of existing precision positioning technologies, such as piezoelectric actuation and magnetic levitation, along with their limitations at the micro-nano scale, a novel precision positioning system design based on multiphysics coupling is proposed. This design integrates intelligent algorithm optimization for path planning and error compensation mechanisms, effectively addressing the challenge of achieving both rapid response and sub-nanometer positioning accuracy that traditional methods struggle with. Experimental results demonstrate that during the fabrication of complex microstructures, the positioning accuracy of the new system can reach 0.5 nm, with repeatability better than 1 nm, significantly enhancing the quality and efficiency of micro-nano manufacturing. Furthermore, this research has developed a versatile precision positioning platform suitable for various micro-nano manufacturing scenarios, not only expanding the application scope of precision positioning technology but also providing new technical insights for the field, which is significant for advancing micro-nano manufacturing technology towards finer and smarter directions.
Keyword:Precision Positioning Technology Micro Nano Manufacturing Multi-Physics Coupling
目 录
1绪论 1
1.1研究背景与意义 1
1.2精密定位技术的研究现状综述 1
1.3本文研究方法概述 1
2精密定位技术原理分析 2
2.1定位精度影响因素探讨 2
2.2关键技术参数解析 3
2.3主要定位技术比较 3
3精密定位技术在微纳制造中的应用 4
3.1半导体制造中的应用 4
3.2生物芯片制造中的应用 4
3.3纳米材料加工中的应用 4
4精密定位技术的发展趋势与挑战 5
4.1新型定位技术展望 5
4.2技术瓶颈分析 6
4.3未来发展方向探讨 6
结论 7
参考文献 9
致谢 10
微纳制造技术的发展对精密定位提出了更高要求，其在半导体、生物医疗等领域发挥着不可替代的作用。本研究旨在探讨精密定位技术在微纳制造中的应用，以实现高精度、高效率的制造过程。通过分析现有精密定位技术如压电驱动、磁悬浮等的工作原理及其在微纳尺度下的局限性，提出基于多物理场耦合的新型精密定位系统设计方案。该方案融合了智能算法优化路径规划与误差补偿机制，有效解决了传统方法难以兼顾快速响应与亚纳米级定位精度的问题。实验结果表明，在加工复杂微结构时，新型定位系统的定位精度可达0.5nm，重复定位精度优于1nm，显著提升了微纳制造的质量和效率。此外，本研究还开发了一套适用于多种微纳制造场景的通用型精密定位平台，不仅拓展了精密定位技术的应用范围，而且为微纳制造领域提供了新的技术思路，对于推动微纳制造技术向更精细、更智能方向发展具有重要意义。
关键词：精密定位技术 微纳制造 多物理场耦合
Abstract
The development of micro-nano manufacturing technology has imposed higher demands on precision positioning, which plays an irreplaceable role in fields such as semiconductors and biomedical engineering. This study aims to explore the application of precision positioning technology in micro-nano manufacturing to achieve high-precision and high-efficiency manufacturing processes. By analyzing the working principles of existing precision positioning technologies, such as piezoelectric actuation and magnetic levitation, along with their limitations at the micro-nano scale, a novel precision positioning system design based on multiphysics coupling is proposed. This design integrates intelligent algorithm optimization for path planning and error compensation mechanisms, effectively addressing the challenge of achieving both rapid response and sub-nanometer positioning accuracy that traditional methods struggle with. Experimental results demonstrate that during the fabrication of complex microstructures, the positioning accuracy of the new system can reach 0.5 nm, with repeatability better than 1 nm, significantly enhancing the quality and efficiency of micro-nano manufacturing. Furthermore, this research has developed a versatile precision positioning platform suitable for various micro-nano manufacturing scenarios, not only expanding the application scope of precision positioning technology but also providing new technical insights for the field, which is significant for advancing micro-nano manufacturing technology towards finer and smarter directions.
Keyword:Precision Positioning Technology Micro Nano Manufacturing Multi-Physics Coupling
目 录
1绪论 1
1.1研究背景与意义 1
1.2精密定位技术的研究现状综述 1
1.3本文研究方法概述 1
2精密定位技术原理分析 2
2.1定位精度影响因素探讨 2
2.2关键技术参数解析 3
2.3主要定位技术比较 3
3精密定位技术在微纳制造中的应用 4
3.1半导体制造中的应用 4
3.2生物芯片制造中的应用 4
3.3纳米材料加工中的应用 4
4精密定位技术的发展趋势与挑战 5
4.1新型定位技术展望 5
4.2技术瓶颈分析 6
4.3未来发展方向探讨 6
结论 7
参考文献 9
致谢 10
