微纳制造技术在微电机中的应用研究 -机械制造及自动化(专)专业

摘要

微纳制造技术的发展为微电机的性能提升提供了新的机遇，传统制造工艺难以满足微电机对高精度、微型化等要求，而微纳制造技术凭借其独特优势成为解决这一问题的关键。本研究旨在探索微纳制造技术在微电机中的应用，以期提高微电机的性能并拓展其应用领域。通过对比分析多种微纳制造技术，选取了适合微电机制造的微细电火花加工、激光直写技术和纳米压印技术等，并将这些技术应用于微电机关键部件如定子、转子的制造过程中。研究结果表明，采用微纳制造技术可显著提高微电机关键部件的加工精度和表面质量，使微电机的体积大幅减小的同时提高了效率和可靠性。此外，基于微纳制造技术实现了微电机结构的创新设计，例如开发出具有特殊拓扑结构的定子，这种结构能够增强磁场强度从而提升微电机输出功率。本研究不仅为微电机制造提供了新方法，还推动了微纳制造技术在其他精密机电系统中的应用发展，为实现高性能微电机的大规模生产奠定了基础。

关键词：微纳制造技术；微电机；微细电火花加工

Abstract

The development of micro-nano manufacturing technology provides a new opportunity for the performance improvement of micro-motors. The traditional manufacturing process is difficult to meet the requirements of micro-motors for high precision and miniaturization, and micro-nano manufacturing technology has become the key to solve this problem with its unique advantages. The purpose of this study is to explore the application of micro-nano manufacturing technology in micromotors, in order to improve the performance of micromotors and expand their application fields. By comparing and analyzing a variety of micro and nano manufacturing technologies, micro-EDM, laser direct writing and nano imprinting technologies suitable for micromotor manufacturing are selected, and these technologies are applied to the manufacturing process of key components of micromotor such as stator and rotor. The results show that the machining precision and surface quality of key components of micromotor can be significantly improved by using micro-nano manufacturing technology, and the volume of micromotor can be greatly reduced, while the efficiency and reliability can be improved. In addition, innovative designs of micromotor structures have been achieved based on micro-nano manufacturing techniques, such as the development of stators with special topologies that enhance the magnetic field strength and thus increase the output power of the micromotor. This research not only provides a new method for micromotor manufacturing, but also promotes the application of micro-nano manufacturing technology in other precision electromechanical systems, and lays a foundation for the large-scale production of high-performance micromotors.

Key Words：micro and nano manufacturing technology; Micromotor; Micro EDM

摘要 I

Abstract II

第1章绪论 1

1.1 研究背景与意义 1

1.2 国内外研究现状 1

第2章微纳制造技术基础 3

2.1 微纳制造技术原理 3

2.2 关键工艺流程分析 3

2.3 技术发展趋势探讨 4

第3章微电机制造中的微纳应用 6

3.1 材料选择与特性 6